节省光刻胶的超声雾化喷涂工艺雾锥特性研究

向东;瞿德刚;牟鹏;王汉;刘楠

Research on the Spray Cone’s Characteristics of the Photoresist Saving-oriented Ultrasonic Atomizing Spraying Process

XIANG Dong;QU Degang;MOU Peng;WANG Han;LIU Nan

. 2013, (7): 13 -20 .