• CN:11-2187/TH
  • ISSN:0577-6686
新型一体式微夹头的设计及其试验研究
李伟;周志雄;肖航;尹邦飞
Design and Experimental Investigation of a New Monolithic Micro-chuck
LI Wei;ZHOU Zhixiong;XIAO Hang;YIN Bangfei
. 2014, (1): 193 -198 .