高深宽比微细结构电铸时传质过程数值分析

明平美;朱荻;胡洋洋;曾永彬

Numericall Analysis on Mass Transport in Micro Electroforming of Micro Structures with High-aspect-ratio

MING Pingmei;ZHU Di;HU Yangyang;ZENG Yongbin

. 2008, (8): 195 -201 .