• CN:11-2187/TH
  • ISSN:0577-6686
梳齿式微机械加速度计闭环系统的线性度
吴天准;董景新;赵长德;冯宇翔
CLOSED-LOOP SYSTEM LINEARITY OF A COMB-FINGER MICRO-ACCELEROMETER
WU Tianzhun;DONG Jingxin;ZHAO Changde;FENG Yuxiang
. 2006, (12): 128 -131 .