步进扫描光刻机硅片台连续扫描时间优化算法

潘海鸿;李小清;严思杰;陈琳;周云飞

Time-optimal Algorithms for Continuous Scans of Wafer Stage of Step-scan Lithography Tool

PAN Haihong;LI Xiaoqing;YAN Sijie;CHEN Lin;ZHOU Yunfei

. 2008, (10): 154 -161 .