超精密微动台离散回路成形控制器优化

杨进;朱煜;尹文生;杨开明;张鸣

Discrete Loop Shaping Controller Optimization for Ultra-precision Positioning Stage

YANG Jin;ZHU Yu;YIN Wensheng;YANG Kaiming;ZHANG Ming

. 2013, (10): 178 -185 .