• CN:11-2187/TH
  • ISSN:0577-6686
金刚石车刀前角与切削刃钝圆半径对单晶硅加工表层质量的影响
赵清亮;陈明君;梁迎春;董申;邓驰
EFFECTS OF DIAMOND CUTTING TOOL’S RAKE ANGLE AND ROUNDED CUTTING EDGE RADIUS ON THE MACHINED SINGLE CRYSTAL SILICON SURFACE QUALITY
Zhao Qingliang;Chen Mingjun;Liang Yingchun;Dong Shen;Deng Chi
. 2002, (12): 54 -59 .