• CN:11-2187/TH
  • ISSN:0577-6686
压印光刻工艺中光刻胶填充流变模拟与试验研究
王权岱;段玉岗;卢秉恒;李涤尘;向家伟
Simulation and Experimental Study on Photoresist Flow and Deforming Behavior in Imprint Lithography Process
WANG Quandai;DUAN Yugang;LU Bingheng;LI Dichen;XIANG Jiawei
. 2010, (3): 165 -171 .