单晶SiC化学机械抛光液的固相催化剂研究
徐少平, 路家斌, 阎秋生, 宋涛, 潘继生
Solid Catalysts Based on Fenton Reaction for SiC Wafer in Chemical Mechanical Polishing
XU Shaoping, LU Jiabin, YAN Qiusheng, SONG Tao, PAN Jisheng
机械工程学报
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2017, (21): 167
-173
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DOI: 10.3901/JME.2017.21.167
