基于压电驱动器的微动平台开环精密定位控制研究

魏燕定;吕永桂;陈子辰

RESEARCH ON OPEN-LOOP PRECISION POSITIONING CONTROL OF A MICRODISPLACEMENT PLATFORM BASED ON PIEZOELECTRIC ACTUATORS

Wei Yanding;Lü Yonggui;Chen Zichen

. 2004, (12): 81 -85 .