单晶硅多晶面表面波波速曲线超声测量方法
宋国荣, 洪广富, 卢东, 吕炎, 何存富, 吴斌
Measurement of Surface Acoustic Wave Velocity Curves of Silicon Crystal by Ultrasonic Method
SONG Guorong, HONG Guangfu, LU Dong, LÜ Yan, HE Cunfu, WU Bin
机械工程学报
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2018, (6): 110
-117
.
DOI: 10.3901/JME.2018.06.110
