基于激光干涉仪与自准直仪的平面镜轮廓高精度测量技术

杨平;朱睿;郭隐彪;高增潔

A High-precision Measurement Technique of Flat Mirror Profile Comprising Interferometers and Autocollimator

YANG Ping;ZHU Rui;GUO Yinbiao;TAKAMASU Kiyoshi

. 2013, (17): 52 -58 .