两步压入法——薄膜力学性能的可靠测量方法

田家万;韩增虎;赖倩茜;虞晓江;李戈扬

TWO-STEP PENETRATION—A RELIABLE METHOD FOR THE MEASUREMENT OF MECHANICAL PROPERTIES OF THIN FILMS

Tian Jiawan;Han Zenghu;Lai Qianxi;Yu Xiaojiang;Li Geyang

. 2003, (6): 71 -74 .