• CN:11-2187/TH
  • ISSN:0577-6686
面向布气均匀性的竖直式喷淋头布气系统优化设计
夏焕雄;向东;牟鹏
Numerical Optimization of a Showerhead System for the Distribution of Gas Flow Uniformity
XIA Huanxiong;XIANG Dong;MOU Peng
. 2014, (19): 112 -119 .