压电驱动的六自由度微振动主被动隔离单元

申妍, 张跃, 谢溪凌, 张志谊

Six-DOF Active/passive Isolator with Integrated Piezoelectric Actuators for Micro-vibration Control

SHEN Yan, ZHANG Yue, XIE Xiling, ZHANG Zhiyi

机械工程学报 . 2026, (13): 135 -143 . DOI: 10.3901/JME.260307