硅片磨床用空气静压主轴动态特性研究
徐嘉慧, 康仁科, 朱祥龙, 董志刚, 李猛
Research on Dynamic Characteristics of Air Static Pressure Spindle for Silicon Wafer Grinding Machine
XU Jiahui, KANG Renke, ZHU Xianglong, DONG Zhigang, LI Meng
机械工程学报
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2025, (5): 108
-116
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DOI: 10.3901/JME.2025.05.108
