基于摩擦诱导选择性刻蚀的低反射率锗表面加工研究
王义飞, 何旺, 陈婷婷, 崔立聪, 汪红波, 余丙军, 钱林茂
Research on Friction-induced Selective Etching for Low Reflectance Germanium Surface
WANG Yifei, HE Wang, CHEN Tingting, CUI Licong, WANG Hongbo, YU Bingjun, QIAN Linmao
机械工程学报
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2024, (23): 294
-303
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DOI: 10.3901/JME.2024.23.294
