玻璃与碳化硅阳极键合机理及其力学性能研究
刘伟, 胡利方, 郑植, 高伟, 丑昭, 成晓, 王勇
Study on the Anodic Bonding Mechanism and Mechanical Properties of Glass and Silicon Carbide
LIU Wei, HU Lifang, ZHENG Zhi, GAO Wei, CHOU Zhao, CHENG Xiao, WANG Yong
机械工程学报
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2024, (16): 151
-159
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DOI: 10.3901/JME.2024.16.151
