氟等离子体对石墨烯纳晶碳膜的刻蚀加工及摩擦学性能调控
郭美玲, 杨雷, 李鹏阳, 许振涛, 许超愿, 王权岱, 李言
Tribological Behavior Regulation of Graphene Nanocrystallites Embedded Carbon Film by Fluorine Plasma Etching
GUO Meiling, YANG Lei, LI Pengyang, XU Zhentao, XU Chaoyuan, WANG Quandai, LI Yan
机械工程学报
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2024, (15): 216
-226
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DOI: 10.3901/JME.2024.15.216
