超声空化辅助金刚石线锯切割单晶硅机理分析与试验验证
王艳, 何顺, 陈奕璋, 姜晨, 钱兆峰, 陈浩毅
Mechanism Analysis and Experimental Verification of Ultrasonic Cavitation Assisted Diamond Wire Saw Cutting Monocrystalline Silicon
WANG Yan, HE Shun, CHEN Yizhang, JIANG Chen, QIAN Zhaofeng, CHEN Haoyi
机械工程学报
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2024, (9): 114
-126
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DOI: 10.3901/JME.2024.09.114
