平面光学元件超平整吸附装载的优化设计与分析
赵承伟, 张文豪, 龚天诚, 张逸云, 王长涛, 罗先刚
Optimal Design and Analysis of Ultra-flat Adsorption Loading for Planar Optical Components
ZHAO Chengwei, ZHANG Wenhao, GONG Tiancheng, ZHANG Yiyun, WANG Changtao, LUO Xiangang
机械工程学报
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2024, (5): 241
-248
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DOI: 10.3901/JME.2024.05.241
