碳化硅纳米抛光亚表面损伤机理的分子动力学模拟
华东鹏, 周青, 王婉, 李硕, 王志军, 王海丰
A Molecular Dynamics Simulation on the Subsurface Damage Mechanism in the Nano-polishing Process of Silicon Carbide
HUA Dongpeng, ZHOU Qing, WANG Wan, LI Shuo, WANG Zhijun, WANG Haifeng
机械工程学报
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2024, (5): 231
-240
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DOI: 10.3901/JME.2024.05.231
