硅外延生长反应腔内外延反应过程的数值仿真建模及实验研究
邓世伟, 沈文杰, 陈宇宏, 白天, 梅德庆, 汪延成
Numerical Modeling and Experimental Study of the Reaction Process in Silicon Epitaxial Growth Reaction Chamber
DENG Shiwei, SHEN Wenjie, CHEN Yuhong, BAI Tian, MEI Deqing, WANG Yancheng
机械工程学报
.
2024, (5): 209
-218
.
DOI: 10.3901/JME.2024.05.209
