单晶金刚石衬底超精密加工损伤层无损测量与表征
李子清, 崔长彩, 卞素标, 李慧慧, 陆静, ORIOL Arteaga, 徐西鹏
Non-destructive Measurement and Characterization of Damage Layer of Single-crystal Diamond Substrate after Ultra-precision Machining
LI Ziqing, CUI Zhangcai, BIAN Subiao, LI Huihui, LU Jing, ORIOL Arteaga, XU Xipeng
机械工程学报
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2024, (4): 239
-249
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DOI: 10.3901/JME.2024.04.239
