匀光阵列微结构模具高性能非接触仿形抛光
郭江, 张鹏飞, 杨哲, 赵勇, 李琳光, 景召, 张蒙, 庞桂兵
Investigation on High-performance Non-contact Shape Profiling Polishing for Array Diffuser Mold
GUO Jiang, ZHANG Pengfei, YANG Zhe, ZHAO Yong, LI Linguang, JING Zhao, ZHANG Meng, PANG Guibing
机械工程学报
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2024, (1): 127
-136
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DOI: 10.3901/JME.2024.01.127
