多级触发脉冲电弧源技术制备掺氮ta-C薄膜的力学性能研究
赵栋才, 马占吉, 刘兴光, 郑军, 张子扬
Study on Mechanical Properties of Nitrogen-doped ta-C Thin Films Prepared by Multi-stage Triggered Pulsed Arc Source Technology
ZHAO Dongcai, MA Zhanji, LIU Xingguang, ZHENG Jun, ZHANG Ziyang
机械工程学报
.
2023, (24): 108
-117
.
DOI: 10.3901/JME.2023.24.108
