单晶硅的激光抛光表面形貌演化
李涛, 黄惟琦, 龙归, 杨思铄, 张建国, 肖峻峰, 许剑锋
Surface Topography Evolution of Single Crystal Silicon in Laser Polishing
LI Tao, HUANG Weiqi, LONG Gui, YANG Sishuo, ZHANG Jianguo, XIAO Junfeng, XU Jianfeng
机械工程学报
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2023, (21): 52
-64
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DOI: 10.3901/JME.2023.21.052
