电子器件高精高效制造的若干关键技术研究进展
陈新, 陈云, 杨志军, 高健, 陈桪
Research Advances in Several Key Technologies for High Precision and High Efficiency Manufacturing of Electronic Devices
CHEN Xin, CHEN Yun, YANG Zhijun, GAO Jian, CHEN Xun
机械工程学报
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2023, (19): 164
-175
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DOI: 10.3901/JME.2023.19.164
