基于自修正系数和模糊PID的高端装备亚微米级不平衡振动靶向抑制方法
许聪聪, 潘鑫, 张皓宇, 张馨
A Submicron Unbalance Vibration Targeted Suppression Method for High-end Equipment Based on Self-correcting Coefficient and Fuzzy PID
XU Congcong, PAN Xin, ZHANG Haoyu, ZHANG Xin
机械工程学报
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2023, (13): 184
-192
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DOI: 10.3901/JME.2023.13.184
