基于“误差流”理论的精密线性平台微行程定位精度表征方法
唐皓, 张栋, 张贺, 高贵兵, 郑煜
Positioning Accuracy Characterization Approach in Micro-scale Displacement for Precise Linear Stage Based on Stream of Variation Theory
TANG Hao, ZHANG Dong, ZHANG He, GAO Guibing, ZHENG Yu
机械工程学报
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2023, (13): 49
-58
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DOI: 10.3901/JME.2023.13.049
