• CN:11-2187/TH
  • ISSN:0577-6686
GaAs材料解理加工分子动力学分析及工艺实验
姜晨, 高睿, 郑泽希
Molecular Dynamics Simulation and Experimental Investigation of Mechanical Cleavage of GaAs
JIANG Chen, GAO Rui, ZHENG Zexi
机械工程学报 . 2023, (5): 317 -324 .  DOI: 10.3901/JME.2023.05.317