(111)硅片的高性能热堆式气体流量传感器及其封装技术研究

黄涛, 王家畴, 李昕欣

High-performance p+ Si/Au Thermopile-based Gas Flow Sensor in （111） Silicon and Its Packaging Technology

HUANG Tao, WANG Jiachou, LI Xinxin

机械工程学报 . 2023, (2): 30 -38 . DOI: 10.3901/JME.2023.02.030