单晶硅微细磨削非稳态特征声发射信号感知研究
张学学, 任莹晖, 杨伟程, 李伟, 于康宁
Study on Acoustic Emission Signal Perception of Unsteady Characteristic in Micro-grinding of Monocrystalline Silicon
ZHANG Xuexue, REN Yinghui, YANG Weicheng, LI Wei, YU Kangning
机械工程学报
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2022, (15): 121
-133
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DOI: 10.3901/JME.2022.15.121