• CN:11-2187/TH
  • ISSN:0577-6686
单晶硅微细磨削非稳态特征声发射信号感知研究
张学学, 任莹晖, 杨伟程, 李伟, 于康宁
Study on Acoustic Emission Signal Perception of Unsteady Characteristic in Micro-grinding of Monocrystalline Silicon
ZHANG Xuexue, REN Yinghui, YANG Weicheng, LI Wei, YU Kangning
机械工程学报 . 2022, (15): 121 -133 .  DOI: 10.3901/JME.2022.15.121