光学元件全口径抛光中温度分布对元件面形的影响规律及其控制方法研究
张飞虎, 王乙任, 廖德锋, 任乐乐, 李琛
Study on the Influence of Temperature Distribution in the Optical Elements on the Surface Shape and Its Control Method during Full Aperture Polishing
ZHANG Feihu, WANG Yiren, LIAO Defeng, REN Lele, LI Chen
机械工程学报
.
2022, (15): 46
-54
.
DOI: 10.3901/JME.2022.15.046
