转印掩膜电解加工宏量金属微结构
申继文, 明平美, 张新民, 牛屾, 夏亚坤, 张云燕, 王伟, 李冬冬
Fabrication of Massive Metal Microstructures by Rotating Through-mask Electrochemical Transferring Technology
SHEN Jiwen, MING Pingmei, ZHANG Xinmin, NIU Shen, XIA Yakun, ZHANG Yunyan, WANG Wei, LI Dongdong
机械工程学报
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2022, (11): 295
-307
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DOI: 10.3901/JME.2022.11.295
