紫外光活化低温键合研究进展
王晨曦, 戚晓芸, 方慧, 康秋实, 周诗承, 许继开, 田艳红
Research Progress on Ultraviolet Activated Low-temperature Bonding
WANG Chenxi, QI Xiaoyun, FANG Hui, KANG Qiushi, ZHOU Shicheng, XU Jikai, TIAN Yanhong
机械工程学报
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2022, (2): 122
-135
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DOI: 10.3901/JME.2022.02.122
