熔石英光学元件加工亚表面缺陷检测及抑制技术研究进展
陈明君, 王会尧, 程健, 赵林杰, 杨浩, 刘启, 谭超, 尹朝阳, 杨子灿, 丁雯钰
Progress in Detection and Suppression Techniques for Processing-induced Sub-surface Defects of Fused Silica Optical Elements
CHEN Mingjun, WANG Huiyao, CHENG Jian, ZHAO Linjie, YANG Hao, LIU Qi, TAN Chao, YIN Zhaoyang, YANG Zican, DING Wenyu
机械工程学报
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2021, (20): 1
-19
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DOI: 10.3901/JME.2021.20.001