新一代半导体材料氧化镓单晶的制备方法及其超精密加工技术研究进展
高尚, 李洪钢, 康仁科, 何宜伟, 朱祥龙
Recent Advance in Preparation and Ultra-precision Machining of New Generation Semiconductor Material of β-Ga2O3 Single Crystals
GAO Shang, LI Honggang, KANG Renke, HE Yiwei, ZHU Xianglong
机械工程学报
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2021, (9): 213
-232
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DOI: 10.3901/JME.2021.09.213
