杂质磷对单晶硅微结构疲劳特性的影响——基于Paris公式的分析
刘彬;陶俊勇;张云安;陈循;王晓晶
Analysis of the Effect of Phosphorus Doping on the Lifetime of the Single Crystal Silicon Micro-beam Based on Paris Formula
LIU Bin;TAO Junyong;ZHANG Yunan;CHEN Xun;WANG Xiaojing
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2014, (24): 86
-92
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DOI: 10.3901/JME.2014.24.086
