沉积温度对脉冲真空弧源沉积类金刚石薄膜性能的影响
冷永祥;孙永春;孙鸿;陈俊英;王进;黄楠
EFFECT OF SUBSTRATE TEMPERATURE ON PROPERTIES OF THE DIAMOND-LIKE CARBON DEPOSITED BY PULSED VACUUM ARC PLASMA DEPOSITION
Leng Yongxiang;Sun Yongchun;Sun Hong;Chen Junying;Wang Jin;Huang Nan
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2004, (7): 20
-23
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