• CN:11-2187/TH
  • ISSN:0577-6686
基于中心复合设计试验的SiC单晶片超声振动加工工艺参数优化
刘永;李淑娟;李言;孔令飞;万波
Central Composite Design Test Based Process Parameters Optimizing for Compound Machining with Ultrasonic Vibration on SiC Wafer
LIU Yong;LI Shujuan;LI Yan;KONG Lingfei;WAN Bo
. 2013, (7): 193 -198 .