金刚石线锯横向超声振动切割SiC单晶表面 粗糙度预测*
李伦, 李淑娟, 汤奥斐, 李言, 杨明顺
Surface Roughness Prediction of SiC Monocrystalline Cut by Diamond Wire-saw Excited by Transverse Ultrasonic Vibration
LI Lun, LI Shujuan, TANG Aofei, LI Yan, YANG Mingshun
机械工程学报
.
2016, (19): 204
-212
.
DOI: 10.3901/JME.2016.19.204
