• CN:11-2187/TH
  • ISSN:0577-6686
单晶硅超精密磨削过程的分子动力学仿真
郭晓光;郭东明;康仁科;金洙吉
MOLECULAR DYNAMICS SIMULATION IN MONOCRYSTAL SILICON GRINDING
GUO Xiaoguang;GUO Dongming;KANG Renke;JIN Zhuji
. 2006, (6): 46 -50 .