不同氧化剂对6H-SiC化学机械抛光的影响
倪自丰, 陈国美, 徐来军, 白亚雯, 李庆忠, 赵永武
Effect of Different Oxidizers on Chemical Mechanical Polishing of 6H-SiC
NI Zifeng, CHEN Guomei, XU Laijun, BAI Yawen, LI Qingzhong, ZHAO Yongwu
机械工程学报
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2018, (19): 224
-231
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DOI: 10.3901/JME.2018.19.224