大行程三平动柔性微定位平台的设计分析及优化
曹毅, 王保兴, 孟刚, 林苗, 张洪
Design Analysis and Optimization of Large Range Spatial Translational Compliant Micro-positioning Stage
CAO Yi, WANG Baoxing, MENG Gang, LIN Miao, ZHANG Hong
机械工程学报
.
2020, (17): 71
-81
.
DOI: 10.3901/JME.2020.17.071
