基于共晶键合技术的CMUTs结构设计与试验测试
李支康, 赵立波, 赵一鹤, 李杰, 郭帅帅, 罗国希, 徐廷中, 刘子晨, 李雪娇, 蒋庄德
Design and Experimental Characterization of CMUTs Based on Eutectic Bonding Technology
LI Zhikang, ZHAO Libo, ZHAO Yihe, LI Jie, GUO Shuaishuai, LUO Guoxi, XU Tingzhong, LIU Zicheng, LI Xuejiao, JIANG Zhuangde
机械工程学报
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2020, (13): 67
-76
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DOI: 10.3901/JME.2020.13.067
