层合薄膜电容式微加工超声换能器(CMUTs)谐振频率分析
李支康, 赵立波, 李杰, 赵一鹤, 徐廷中, 罗国希, 李雪娇, 郭帅帅, 蒋庄德
Resonant Frequency Analysis of Capacitive Micromachined Ultrasonic Transducers (CMUTs) with Layered Membranes
LI Zhikang, ZHAO Libo, LI Jie, ZHAO Yihe, XU Tingzhong, LUO Guoxi, LI Xuejiao, GUO Shuaishuai, JIANG Zhuangde
机械工程学报
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2019, (24): 11
-20
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DOI: 10.3901/JME.2019.24.011
