α-C：H膜系与氮化物膜系的结构性能比较及机理分析

于斌斌;袁军堂;汪振华;胡小秋;王飞

Comparison on Properties and Mechanism of α-C：H Films System and Nitride Films System

YU Binbin;YUAN Juntang;WANG Zhenhua;HU Xiaoqiu;WANG Fei

. 2013, (16): 91 -99 .