基于AFM的纳米尺度线宽计量模型及其算法的研究
赵学增;褚巍;Theodore V Vorburger;Joseph Fu;John Song;Cattien V Nguyen
METROLOGICAL AND ALGORITHM MODEL FOR NANO–SCALE LINEWIDTH MEASUREMENTS USING AFM
Zhao Xuezeng;Chu Wei;Theodore V Vorburger;Joseph Fu;John Song;Cattien V Nguyen
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2004, (4): 50
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