大数据驱动的晶圆工期预测关键参数识别方法

汪俊亮, 张洁

Big Data Driven Key Factor Identification for Cycle-time Forecasting of Wafer Lots in Semiconductor Wafer Fabrication System

WANG Junliang, ZHANG Jie

机械工程学报 . 2018, (23): 185 -191 . DOI: 10.3901/JME.2018.23.185